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MEMS Capacitive Accelerometer MS1000L

Single Axis Analog Accelerometer

The MS1000L product is a MEMS capacitive accelerometer based on a bulk micro-machined silicon element specifically designed for highest stability.

Features

Key capabilities and advantages

  • In-run bias stability (Allan Variance @ 10 s): 15 μg (10g, typ)
  • Low Noise: 34μg / √Hz (10g range)
  • Extremely robust : up to 6000g
  • -55°C to +125°C Linear bias

Specification

Technical specifications and parameters

Full Scale Acceleration up to +/- 100g
Bias Temperature Coeff +/- 5 mg /°C
Noise in band 3.5 ppm/√Hz of full scale
In run bias stability (Allan Var. @ 10s) 1.5 ppm of full scale
Operating Power Consumption 10mW
Operating Temperature -40°C to +125°C
Size 9×9 mm2
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2026
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